The Physics of Submicron Lithography formatIsbn:Hardcover 9780306435782 UniversityofFlorence LarryChen KodakResearchLabs JohnP 70174 Stuttgart UniversityofFlorence LarryChen KodakResearchLabs JohnP The Hotine Marussi Symposium is the core meeting of a “think thank” In this method the device is imaged as a pattern on a metal film that has been deposited onto a transparent substrate and by means of a broad stream of light is transferred to a semiconductor wafer within which the physical structure of the devices and the integrated circuit connections are formed layer by layer The need for this book results from the following considerations